4 INCH C-PLANE(0001) SAPPHIRE WAFERS

Wafer saphir is being used extensively as a substrate for III-V nitrides and for many other epitaxial films. We supply 99.999% high purity sapphire wafers with an excellent surface finish to meet your rigorous requirements.


Specifications of 4 Inch C-plane(0001) Sapphire Wafer
Item 4-inch C-plane(0001) 650μm Sapphire Wafers
Crystal Materials 99,999%, High Purity, Monocrystalline Al2O3
Grade Prime, Epi-Ready
Surface Orientation C-plane(0001)
C-plane off-angle toward M-axis 0.2 +/- 0.1°
Diameter 100.0 mm +/- 0.1 mm
Thickness 650 μm +/- 25 μm
Primary Flat Orientation A-plane(11-20) +/- 0.2°
Primary Flat Length 30.0 mm +/- 1.0 mm
Single Side Polished Front Surface Epi-polished, Ra < 0.2 nm (by AFM)
(SSP) Back Surface Fine ground, Ra = 0.8 μm to 1.2 μm
Double Side Polished Front Surface Epi-polished, Ra < 0.2 nm (by AFM)
(DSP) Back Surface Epi-polished, Ra < 0.2 nm (by AFM)
TTV < 20 μm
BOW < 20 μm
WARP < 20 μm
Cleaning / Packaging Class 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.
Note: Custom c axis sapphire with any orientation and any thickness can be provided.

If you want to know more about custom sapphire optics, please contact us.