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quality cvd machine equipment cvd tube furnace cvd furnace

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quality cvd machine equipment cvd tube furnace cvd furnace

Name: quality cvd machine equipment cvd tube furnace cvd furnace
Brand: Xingyang Yuli Machinery Equipment Co., Ltd.
Rating: 4.4 (38 reviews)

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Model No. :	YL-CVDTF
Brand Name :	YL

9yrs

Xingyang, Henan, China

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Xingyang Yuli Machinery Equipment Co., Ltd.

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Product description

Product Description Specifications

Multi Zone Split Tube furnace with Sliding Rail

1. Max 1100, 1300 or 1500ºC for continuous heating
2. 1, 2, 3, 4, 5, or more programmable precision digital temperature controllers with 30 segments.
3. 1--5 separately controlled Heating Zones:
4. High purity 1200C quartz tube or 1600C alumina tube:
1. 1. 200mm length for each heating zone
2. 2. 400mm total in heating length
3. 3. 250mm constant central temperature heating area if both zones were heated at the same temperature
4. 4. 500ºC max temperature discrepancy between two zone with thermoblocks in between
5. 40mm OD x 1200mm ID Length
60mm OD x 1200mm ID Length

80mm OD x 1200mm ID Length

100mm OD x 1200mm ID Length

6. Input power: 110 – 440V AC input, single or three phase at max. 8KW

Plasma RF Power Supply

1. Output Power: 5 -8000W adjustable with ± 1% stability.
2. RF frequency: 13.56 MHz ±0.005% stability.
3. Reflection Power: 200W max.
4. Matching: Automatic
5. RF Output Port: 50 Ω, N-type, female
6. Noise: <50 dB.
7. Cooling: Air cooling.
8. Power : 208-240VAC, Single Phase, 50/60Hz

Anti-corrosive Pressure Gauge

1. 3.8x10^-5 to 1125 Torr measurement range
2. Anti-corrosive, gas-type independent
3. High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
4. Fast atmospheric detection eliminates waiting time and shortens process cycle
5. Easy to exchange plug & play sensor element
6. Click pic to view detal spec.

Oil-less Vacuum Pump Station and Valves

1. Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy duty mobile cart
2. KF25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve for customer's plug and play
3. 15 X 10-2 vacuum can be achieved inside processing tube

Mass Flow meters & Gas Mixing Station

It is installed in a heavy duty mobile cart where the tube furnace can be placed on the top. LCD touch screen is integrated to provide easy control on the gas flow rate of each independent channel.

1. Working Temperature: 5~45 ºC
2. Max. Pressure: 3x10⁶Pa
3. Accuracy: ±1.5% FS
4. Liner: ±(0.5-1.5)%F.S.
5. Duplicate accuracy: ±0.2%F.S.
6. Controlling Range:
1. 1. Controller 1: 0~100 SCCM
2. 2. Controller 2: 1~199 SCCM
3. 3. Controller 3: 1~199 SCCM
4. 4. Controller 4: 1~499 SCC

Heating & Cooling Rates

RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one from here )
In order to achieve Max.heating rate, the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone

Heating Rate:

15°C/sec (RT - 150°C);

10°C/sec (150°C - 250°C);

7°C/sec (250°C - 350°C);

4°C/sec (350°C - 500°C);

3°C/sec (350°C - 550°C);

2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);

Cooling Rate:

15°C/sec (1000 - 950°C);

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);

Warranty

One year limited warranty with lifetime support .