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Model No. : | CCZK-ION series |
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Brand Name : | CICEL |
Product description
Vacuum chamber | Ø1200mm×H1400mm vertical with single door Chamber material:SUS304 | |
spools | Public rotation(SUS 304) 6 nos | |
Arc power supplier | Max 200a (the digital display) 10sets | |
Ion sputtering source | 10sets | |
Bias power supplier | Pulsed bias 20kw(-1000v) 1set | |
Baking system | Heating tube PID control to 300 celsius | |
Gas flow meter | MFC D07 series (4 sets) | |
Vacuum gauge | ZDF-5227 | |
valve | Main valve | GDQ-630 |
Rough valve | GDQ-100 | |
Front valve | GDQ-100 | |
Vacuum System | Turbo molecular pump | FF-400/3600 2sets (optional) |
Diffussion pump | KT-630 | |
Rotary pump | 2x-70 | |
Roots pump | ZJY-300A | |
Holding pump | 2X-15 | |
Intelligent control system | AUTOMATIC HMI+ PLC controlled | |
Pump speed & ultimate vacuum | 5*10-2pa<4mins & 5*10-5pa | |
Yield time & output | 20-30mins & 3.2m2 per hour(for your product) | |
Total power | 129KW (molecular pump 120kw) | |
FOB(NINGBO) PRICE | DP pump: USD 76000.00 TM pump: USD 96000.00 | |
DELIVERY TIME | 50 working days | |
WENZHOU CICEL VACUUM MACHINE CO., LTD. Miss Rosa M.P:+8613857737962 TEL:0086-577-86739805 FAX:0086-577-56615100 Email:export-a2@ccvacuum.com ADD:NO.9 Binhai Avenue ,Longwan distric,Wenzhou city,China |
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