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H60 Piezo Hexapod is a piezo stage with 6-axis motion of θx, θy, θz, X, Y, and Z.

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H60 Piezo Hexapod is a piezo stage with 6-axis motion of θx, θy, θz, X, Y, and Z.

Name: H60 Piezo Hexapod is a piezo stage with 6-axis motion of θx, θy, θz, X, Y, and Z.
Brand: Harbin Core Tomorrow (CoreMorrow) Science and Technology Co., Ltd.
Rating: 4.9 (40 reviews)

$10000.00

≥1 Piece/Pieces

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Model No. :	H60.XYZTR1S
Brand Name :
place of origin :	China
Types of :	Piezoelectric Ceramics
Load capacity :	5kg
Active axes :	theta x,theta y,theta z,X,Y,Z
Linear travel in X, Y (0~120V) :	±6.5µm±20%
Linear travel in Z (0~120V) :	±3.2µm±20%
Tilt angle in θx, θy(0~120V) :	±0.16(≈±30″)mrad±20%
Tilt angle in θz(0~120V) :	±0.24(≈±50″)mrad±20%
Tilt resolution(θx, θy) :	0.02(<0.01″)μrad
Tilt resolution, θz :	0.04(<0.01″) μrad
Resolution in X, Y :	0.8nm
Resolution in Z :	0.4nm

2yrs

Harbin, Heilongjiang, China

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Harbin Core Tomorrow (CoreMorrow) Science and Technology Co., Ltd.

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Product description

H60 Piezo Hexapod

H60 Piezo Hexapod is a piezo stage with 6-axis motion of θx, θy, θz,X, Y, and Z. 6-axis movement in space is realized by the coordinated expansion and contraction of six piezoelectric actuators. The closed-loop model has high positioning accuracy. It is suited for applications such as microelectronics precision machining, test, etc.

Typical Applications

• 6 axes precise positioning • Semiconductor equipment • Lithography

• Wafer inspection/micromachining • Medical • Aerospace

Characteristics

• Motion in X, Y, Z, θx, θy, θz • Small coupling • Closed-loop version for high accuracy • No accumulation of error

H60.XYZTR5-3

Technical data

H60.XYZTR5S-technical data

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Our Company

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production and testing equipment

Certificate

CoreMorrow has a professional technical R&D team, strong R&D strength, advanced production and testing equipments, customized products can be quickly delivered within 1 to 4 weeks. We have obtained the national high-tech enterprise certification and been certified by ISO9001:2015, CE and RoHS. We own more than 50 patents, including invention patents, utility model patents, appearance patents, and software copyrights, etc. that cover the key technologies of precise positioning, detection, sensing, control, and software.

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