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Super Hard Coating Magnetron Sputtering Vacuum Coating Machine (hardware knife coating)
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| Brand Name : | Fu Sen titanium |
|---|
ZunHua Fu Sen titanium equipment Limited Company
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Product description
This series of equipment mainly dc magnetron sputtering (set), intermediate frequency sputtering and arc evaporation three kinds of technology integration, combined with the linear ionization pulse bias can make refine sedimentary makings, film performance, can be in metal and non-metallic surface plating alloy film, compound film, multilayer composite membrane, etc. Technical personnel for many years the company focus on research and development, through specific cathodic arc ion and unbalanced magnetic control system, and developed a complete set of PROPOWER series automatic computer control system, make the coating layer adhesion density, the good from the complex degree of consistency, solves the complexity of manual operation, coating color is not consistent. Widely used in watches, following from wear-resisting, hardware, sanitary ware, tableware and requirements on hard cutting tools, moulds, etc. Plating Tin, TiCN, CrN, TiALN, TiCrN, ZrN, TiNC and all kinds of metal film (DLC).
Super hard coating vacuum coating machine uses the magnetron cathode arc technology, combined with the magnetron sputtering, ion beam technology patent, implement the film at low temperature (60ºC- 250ºC ),overcome the shortcomings of traditional PVD technology the high temperature process, such as high temperature tempering, deformation and membrane layer cracks, and many other problems. At the same time, the film layer of high temperature technology than ever before with good adhesion, abrasion resistance and comprehensive performance.
Features
Magnetic control, intermediate frequency, multi arc ion plating equipment are applied in hardware, glass crafts, ceramic crafts, etc., such as watches, mobile phones, metal shell, sanitary ware, cutting tools, moulds, electronic products, crystal glass and so on.
This series of equipment are mainly the technology integration of dc magnetron sputtering (set), intermediate frequency sputtering and arc ion , can adapt to the coating material,
No matter metal , medium or compound material, can take advantage of the sputtering process for coating and film forming, and improve the film adhesion, density, complex degree and color consistency. It can plate TiN and TiC, TiCN and TiAlN, CrN, CU, AU, diamond film (DLC), decorative film and nonmetal and its compound membrane and composite membrane layer. Programmable controller (PLC) + touch screen (HMI) combined electrical control system, fully automatic control.
Technical parameters instructions
Super hard coating vacuum coating machine uses the magnetron cathode arc technology, combined with the magnetron sputtering, ion beam technology patent, implement the film at low temperature (60ºC- 250ºC ),overcome the shortcomings of traditional PVD technology the high temperature process, such as high temperature tempering, deformation and membrane layer cracks, and many other problems. At the same time, the film layer of high temperature technology than ever before with good adhesion, abrasion resistance and comprehensive performance.
Features
Magnetic control, intermediate frequency, multi arc ion plating equipment are applied in hardware, glass crafts, ceramic crafts, etc., such as watches, mobile phones, metal shell, sanitary ware, cutting tools, moulds, electronic products, crystal glass and so on.
This series of equipment are mainly the technology integration of dc magnetron sputtering (set), intermediate frequency sputtering and arc ion , can adapt to the coating material,
No matter metal , medium or compound material, can take advantage of the sputtering process for coating and film forming, and improve the film adhesion, density, complex degree and color consistency. It can plate TiN and TiC, TiCN and TiAlN, CrN, CU, AU, diamond film (DLC), decorative film and nonmetal and its compound membrane and composite membrane layer. Programmable controller (PLC) + touch screen (HMI) combined electrical control system, fully automatic control.
Technical parameters instructions
|
Film type |
Black gold titanium nitride, titanium carbide, 7 colour titanium oxide and wear-resistant film, super hard film, diamond film, metal decorative film, etc |
|
The power supply type |
Dc power supply, intermediate frequency power supply, arc power supply, filament, pulse bias power supply |
|
Mutli-arc target |
Mutli-arc target5 or 18, |
|
The twin target |
Intermediate frequency twin column target or target plane (1-4cuples) |
|
Vacuum chamber structure |
Vertical before the door structure (double or sink type cooling water jacket type), rear extraction system |
|
Vacuum system |
Rotary vane pump, roots pump and diffusion pump + maintain pump (or optional: molecular pump, cryogenic pump, cryogenic system) |
|
Heating system |
From room temperature to 350 degrees adjustable control (PID temperature control), stainless steel heating tube heating |
|
Pneumatic system |
Mass flow controller (1-4line) |
|
Ultimate vacuum |
6×10-4 pa(Light, clean room) |
|
Extraction time |
5×10-3 pa<13minutes |
|
The rate of keeping air pressure |
1h≤0.6pa |
|
Work piece rotating way |
Common rotation frequency conversion stepless control is adjustable, 0 to 20 RPM |
|
The control mode |
Manual, semi-automatic and fully automatic integration/touch screen + PLC |
|
note |
Vacuum chamber size can be customized according to the requirements of customers products and special process |
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