Si sputtering target Silicon Target for vacuum sputtering Purity: Si 99.99% min. , 99.999% min ,Si 99.9999% max. Resistivity: 0.2 ohm/cm min. Dimension Length:300mm max. Width:140mm max. Thickness: 3-12mm max. Diameter: 280mm max. Shape: square, rectangle, U shape or as per customer's drawing. Type: mono crystal and poly crystal with boron or phosphorus doped We're ready to give you our best price!