RSE series dry screw vacuum pump(RSE902)
Product features:
1. RSE series dry screw vacuum pump(RSE902) is single stage compression, simple structure.
Partition plate in the cavity, the exhaust path is simple and short, and reactant gas is easily discharged.
2. The high pressure end of the exhausted temprature deposition is easily fixed, and helical rotor with sedment removed.
3. The case of a single-stage exhaust, no change in the internal volume of the continuous operation at atmospheric pressure, and a locking phenomenon does not occur during operation. For symmetrical rotation structure, vibration rate is less than 10u.
4. Low operation noise.
5. The spiral structure of the single segment, the helical part of the maintenance is very easy. With corrosion-resistant materials, only the replacement of the sealed classes of the consumption goods can save on maintenance costs.
Products application:
Widely used in vacuum coating, oven, heat treatment, pharmaceutical, chemical applications, semiconductor, LED and solar cell industry, etc...
Model |
Unit |
RSE 902 |
Pumping speed |
l/min |
12500/15000 |
|
cubic meter per hour |
750/900 |
|
cfm |
441/530 |
Ultimate Pressure |
Torr |
<7.5* 10 ^(-4) |
|
mbar |
<1*10 ^(-3) |
|
Pa |
<0.1 |
Motor frequency |
Hz |
50/60 |
Voltage |
V |
220-440 |
Power |
Hp |
6+4 |
|
Kw |
4.47+2.98 |
Connection inlet |
|
ISO100 |
outlet |
|
Nw40 |
cooling flow |
l/min |
3L/min 15Celsius-7L/min30Celsius |
Temprature |
Celsius |
|
Pressure |
kg/square centimeters |
2.0-4 |
connection |
|
R/C 3/8" |
N2 pressure |
Kg/square centimeters |
0.5~1 |
dilute flow |
l/min |
0~60 |
sealing flow |
l/min |
0~20 |
connection |
|
Swagelok 1/4" |
Dimension:L*W*H: |
mm |
895*410*543 |
weight: |
kg |
520 |
Noise: |
dB(A) |
<70 |
interface |
|
SEMIE73-0299 |
pump leak rate: |
mbar .l/s |
1*10^(-5) |
Ambient Temp: |
Celsius |
5~40Celsius |
operatoin mositure: |
RH |
90% |