Product description
poly and mono Silicon Target Purity: Si 4N min., 5N min. and 6N min. Resistivity: 0.005-0.02 ohm/cm 0.02-100 ohm/cm Dimensions length:320mm max. width:140mm max. thickness:3-12mm diameter:280mm max. Type: Both Mono crystal silicon target and Poly crystal silicon targets with boron or phosphorus doped are available. For more information, pls feel free to contact us.